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Programmable bake plate for silicon wafers

29th November 2017


Torrey Pines Scientific has introduced its WaferPlate Programmable Bake Plate with uniform heating across the surface of better than 1% over a heating range from room temperature to 350°C. It is ideal for precisely heating 12in (304.8mm) and smaller silicon wafers, electronic chips, displays, adhesives, and for doing photo-resists and more.

The WaferPlate Model HP90 has a large circular 13.875in (352.4mm) milled-flat plate aluminium surface with temperature uniformity better than 1% across the centre 12in (304mm), making it ideal for working with 12in or smaller silicon wafers. The unit is controllable remotely from a PC or industrial controller via the RS-232 I/O port using the command set provided. Also provided is a bench top controller which is fully programmable holding 5 routines of 10 steps each in memory for instant and repeatable recall and use. Each program can be made to repeat itself automatically from 1 to 98 times or infinitely.

The plate surface can be set from room temperature to 350°C and can be set and controlled directly to 1°C. Accuracy is better than 1% of the heater setting over the entire range.Temperature sensing is by platinum RTD built into the heater plate. The HP90 has temperature ramping from 1°C/hour to 450°C/hour, count down timer with alarm and user settable Auto-Off and RS-232 I/O port. The units are supplied with temperature calibration certificates traceable to NIST.





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